Micromechanical microphone using sideband modulation of nonlinear resonators

We report successful detection of an audio signal via sideband modulation of a nonlinear piezoelectric micromechanical resonator. The 270 × 96-μm resonator was shown to be reliable in audio detection for sound intensity levels as low as ambient room noise and to have an unamplified sensitivity of 23.9 μV/Pa. Such an approach may be adapted in acoustic sensors and microphones for consumer electronics or medical equipment such as hearing aids.

https://doi.org/10.1063/1.4996993